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Review on Micro Chip Exploding Foil Initiator and Its Planar High⁃voltage Switch

YANG Zhi，ZHU Peng，XU Cong，ZHANG Qiu，QIN Xin，SHEN Rui⁃qi
（School of Chemical Engineering，Nanjing University of Science and Technology，Nanjing 210094，China）

Abstract：Each technology upgrading of Exploding Foil Initiator system（EFIs）is accompanied with the innovation of design con⁃
cepts and manufacture processes，especially the technologies of Micro Electro Mechanical System（MEMS）and Low Tempera⁃
ture Co⁃fired Ceramics（LTCC）greatly promote the development of Micro Chip Exploding Foil Initiator system（McEFIs）. The ad⁃
vantages and disadvantages of Micro Chip Exploding Foil Iinitiator（McEFI）fabricated by two kinds of processes were briefly ana⁃
lyzed. The working performances of several planar high⁃voltage switches in Capacitor Ddischarge Unit（CDU）were listed，and
the feasibility of manufacture idea and research method of the switch is obtained. The research progress at home and abroad
based on the preparation of MEMS process and LTCC process，and the study of McEFI，planar high⁃voltage switch as well as pla⁃
nar high⁃voltage switch integrated with McEFI was summarized respectively. Key research directions were put forward. In⁃depth
research of the fabrication of McEFI and its planar high⁃voltage switch by the MEMS process will achieve engineering application.
The planar high⁃voltage switch & McEFI with monolithic structure can be fabricated by LTCC technology.
Key words：Micro Chip Exploding Foil Initiator system（McEFIs）；capacitor discharge unit；Micro Chip Exploding Foil Initiator
（McEFI）；planar high⁃voltage switch；research progress
CLC number：TJ45 Document code：A DOI：10.11943/CJEM2018146

Chinese Journal of Energetic Materials，Vol.27, No.2, 2019（167-176） 含能材料 www.energetic-materials.org.cn