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            Simulation Design and Experimental Study for Microstructure Energy Conversion Components with Different
            Bridge Shapes


            ZHANG Bin ,REI Wei 1,2 ,CHU En⁃yi ,ZHAO Yu⁃long ,YIN Ming ,LI Hui 1
                                                                 1
                     1
                                         1
                                                       2
           (1. Science and Technology on Applied Physical Chemistry Laboratory,Shaanxi Applied Physics‑Chemistry Research Institute,Xi′an 710061,China;
             2. The State Key Laboratory for Manufacturing Systems Engineering,Xi′an Jiaotong University,Xi′an 710049,China)
            Abstract:Microstructure energy conversion components are the key components of micro⁃electro⁃mechanical⁃system (MEMS)
            initiating explosive device,its bridge area microstructure design has a significant effect on the output performance and energy uti⁃
            lization rate of MEMS initiating explosive device. To perfect the design theory of microstructure energy conversion components of
            MEMS initiating explosive device,8 kinds of microstructure energy conversion components with different bridge shapes were de⁃
            signed and fabricated. The bridge⁃shaped structure optimization and microstructure effect of microstructure energy conversion
            components were studied by means of simulation research and infrared test. Two kinds of energy conversion components with
            V⁃50 and L⁃1 optimization bridge⁃shaped structure were obtained,and the influence law of different bridge⁃shaped structure on
            the output performance of energy conversion components was revealed,in which,the average ignition voltage of V⁃50
            bridge⁃shaped microstructure energy conversion components reaches 100 μF/3.5 V,and the energy utilization rate is 46.6%.
            Key words:micro⁃electro⁃mechanical⁃system(MEMS)initiating explosive device;microstructure energy conversion component;
            bridge⁃shaped structure;bridge area fusing current
            CLC number:TJ45                            Document code:A                   DOI:10.11943/CJEM2018270






            Chinese Journal of Energetic Materials,Vol.26, No.12, 2018(1056-1060)  含能材料    www.energetic-materials.org.cn
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