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MEMS 9:;/01<^_=p 4 3 5
<。 erationofSiintegratedactuator[J].Sensors&ActuatorsAPhysi
cal,1999,74(1-3):211-215.
(2)ÉÊ«1¿M MEMS /01^_<IÙ, b
[11]TatonG,LagrangeD,ConederaV,etal.Microchipinitiator
c`a“ ô” ¡ªµõ¡`aqf, YZ\] realizedbyintegratingAl/CuO multilayernanothermiteonpoly
QYªRSYZÏVWYZqf;l=©
mericmembrane[J].JournalofMicromechanics&Microengi
neering,2013,23(10):3210-3216.
4 f < D } ~ ¡ ¢ 6 [ D ^ _, 3
[12],&¾.,()*,d.NiCr §¨/01ÁÂ:Ñ^_
MEMS /01<bc^_。 [J].9:;,2010(6):20-22.
XIERuizhen,REN Xiaoming,WANG Kexuan,etal.Studyon
(3)¤¥¦0§¨¡/01A MEMS/01<
etchingtechniquesofNiCrfilm firingresistor[J].Initiators&Py
©OGHop{ª, Ô§¨\y0IJ/01<Ú· rotechnics,2010(6):20-22.
ð~/01Q×<0Át¾;l^_<{ªÊG [13],&¾.,()*,d.NiCr ¡¨/01<yz[J].¦
0\],2011,19(5):584-587.
׳S¤\]§¨\y0<^_}~¦0¡/01'
XIERuizhen,REN Xiaoming,WANG Kexuan,etal.Fabrica
0^_d{7。 tionofNiCrfilm ignitingresistor[J].ChineseJournalofEnerget
(4)7MPQ78¾op<, ¸°^o icMetarials(HannengCailiao),2011,19(5):584-587.
[14]PennarunP,RossiC,EstèveD,etal.Design,fabricationand
MEMS 9:;, K8<bc¹ºÐS>}ÅC»
characterizationofaMEMSsafepyrotechnicaligniterintegrating
&4©S¼½D<:2, cGUü¾¿³ arming,disarmingandsterilizationfunctions[J].JournalofMi
cromechanics&Microengineering,2005,16(1):3591-3594.
MEMS 9:;^yW<À¤Á=2Ä, ÌGkÙn¹
[15]!%,±Í,ÎÏÐ,d.YÎ MEMS <öã)=Q÷â[J].
º、 nb c  } ~ n { | d, v Þ Ô Ã 4 Ä Î ²³tüüó( ìÑü),2004,44(11):1489-1492.
MEMS 9:;<bcÐyzW, ©ê9:;< ZHANG Gaofei,YOU Zheng,HU Jingsong,etal.MEMS
basedpropulsionarrayswithsolidpropellant[J].JournalofTsin
^oMN。
ghuaUniversity(Scienceand Technology),2004,44(11):
1489-1492.
`i!9: [16]NehaMehta,TACOMARDEC,ChemicalEngineer,Designand
[1]#$%,ÄÅÆ,&Ç,d.9:;wx<op5ÈÐÉÊ developmentofmicroenergeticinitiators(MEI)[C] ∥NDIA47th
[J].¦0\],2015,23(3):205-207. AnnualFuzeConference,2003.
CHU Enyi,HEAifeng,REN Xi,etal.Developmentopportuni [17]-.,+ÒÓ,Ô¡,d.MEMS öã4)=QW Cr §¨96
tiesandtechnologicalapproachesforsystem integrationofpyro [<^_[J].K9wxüó,2006,19(5):1411-1414.
technics[J].ChineseJournalofEnergeticMetarials(Hanneng XU Chao,LIZhaoze,WAN Hong,etal.ResearchontheCr
Cailiao),2015,23(3):205-207. membraneignitingresistancein MEMSsolid propellantmicro
[2]ËÌ,+.n © ê 9 : w x ~ Ô Ä [J].« ¬ w x Y 6, thruster[J].ChineseJournalofSensorsandActuators,2006,19
2010(7):40-43. (5):1411-1414.
KONG Junfeng,LIBing.A new generationofinitiationtech [18]DavidH,LewisJ,SiegfriedW,etal.Digitalmicroporpulsion
niqueandapplication[J].TechnologyFoundationofNational [J].SensorsandActuators,2000,80(33):143-154.
Defence,2010(7):40-43. [19]RossiC,LarangotB.FinalcharacterizationsofMEMSbasedpy
[3]ChopinHua.LowcostMEMSinitiatorsmicroassemblytechnolo rotechnicalmicrothrusters[J].Sensors&ActuatorsA Physical,
gies[C] ∥NDIA54thAnnualFuzeConference,2010. 2005,121(2):508-514.
[4]RossiC,EstèveD,MinguésC.Pyrotechnicactuator:anewgen [20]+ÒÓ,-.,ÕüÖ,d.Cr §¨<ÑÒÐ×|ÁÂ:Ñ^_
erationofSiintegratedactuator[J].Sensors&ActuatorsAPhysi [J].K9wxüó,2006,19(5):1437-1440.
cal,1999,74(1-3):211-215. LIZhaoze,XU Chao,WU Xuezhong.AStudyonCrthinfilms
[5]RossiC,TempleBoyerP,EstèveD.Realizationandperform depositinganditswetetching[J].ChineseJournalofSensors&
anceofthinSiO 2 /SiNxmembraneformicroheaterapplications Actuators,2006,19(5):1437-1440.
[J].Sensors&ActuatorsAPhysical,1998,64(3):241-245. [21]&¾., , ØÙ, d.NiCr §¨/019D0^_[J].
[6]ZhangKL,ChouSK,AngSS,etal.AMEMSbasedsolidpro 9:;,2011(2):4-6.
pellantmicrothrusterwithAu/Tiigniter[J].Sensors&Actuators REN Xiaoming,XIERuizhen,XUEYan,etal.Studyonfiring
APhysical,2005,122(1):113-123. performanceofNiCrfilm ignitingresistor[J].Initiators&Pyro
[7]ZhangKL,ChouSK,AngSS.Fabrication,modelingandtes technics,2011(2):4-6.
tingofathinfilm Au/Timicroheater[J].InternationalJournalof [22]ÇÈÉ,ÚÛÜ,ÝÞ.,d.(B/Ti) n /TaN §¨9¡<yz
ThermalSciences,2007,45(6):580-588. ~9D0[J].¦0\],2015,23(3):265-269.
[8]LeeJ,LeeD H,KwonS.Designandperformanceevaluationof CAIXianyao,JIANG Hongchuan,YAN Yichao,etal.Fabri
componentsofmicrosolidpropellantthruster[C] ∥ Aiaa/asme/ cation and performancesof(B/Ti) n /TaN thinfilm initiator
sae/aseeJointPropulsionConferenceandExhibit.2004. bridge[J].ChineseJournalofEnergeticMetarials(HannengCail
[9]LeeJ,Kim T.MEMSsolidpropellantthrusterarraywithmicro iao),2015,23(3):265-269.
membraneigniter[J].Sensors& ActuatorsA Physical,2013, [23]ÇÈÉ.(B/Ti) n /TaN ÌH¨9¡<yz~D0^
190(2):52-60. _[D].6wtü,2014.
[10]RossiC,EstèveD,MinguésC.Pyrotechnicactuator:anewgen CAI Xianyao. Fabrication and performances of integrated
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