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ResearchProgressinEnergyConversionComponentsforMEMSInitiatingExplosiveDevice
ZHANG Bin,CHUEnyi,REIWei,WANG Kexuan,LIHui,YIN Ming
(KeyLaboratoryofAppliedPhysicsChemistry,ShaanxiAppliedPhysicsChemistryResearchInstitute,Xi′an710061,China)
Abstract:Theenergyconversioncomponentsasthecorepartsofinitiatingexplosivedeviceareanimportantfactorsaffectingthe
safetyandreliabilityofmicroelectromechanicalsystems(MEMS)initiatingexplosivedevice,andtheeffectonthewholeweapon
system alsocannotbeignored.Materialsresearchandstructuredesignoftheenergyconversioncomponentsareoneofresearch
hotspotsinrecentyears.From theperspectiveofsubstratematerialandresistancematerialresearch,structuredesignandsooneof
energyconversioncomponents,thelatestresearchdevelopmentofenergyconversioncomponentsofMEMSinitiatingexplosivede
viceoverthepastfew yearswasreviewedinthispaper.TwokeytechnologiesforenergyconversioncomponentsofMEMSinitia
tingexplosivedevice:design/preparationmethodoftheenergyconversioncomponentsofMEMSinitiatingexplosivedeviceand
measurementandcharacterizationforperformanceparametersoftheenergyconversioncomponents,wereintroducedPointingout
thattheenergyconversioncomponentofMEMSinitiatingexplosivedevicewithminiaturization,integration,multifunctionand
highreliabilityisahotpointofresearchinthefuture.Toprovidetheoreticalsupportfordesignandresearchoftheenergyconver
sioncomponentofofMEMSinitiatingexplosivedevice,thestudyonheatdissipationcharacteristicsandbridgeresistancecharac
teristicsundermicroscaleshouldbestrengthened.Consideringthatthecompositeenergeticthinfilm bridgeenergyconversion
componentisanimportantdevelopmentdirectionofenergyconversioncomponentofMEMSinitiatingexplosivedevice.
Keywords:micro electromechanicalsystems(MEMS) initiatingexplosivedevice;energyconversion components;thin film
bridge;bridgestructure
CLCnumber:TJ55 Documentcode:A DOI:10.11943/j.issn.10069941.2017.05.013
ChineseJournalofEnergeticMaterials,Vol.25,No.5,2017(428-436) !"#$ www.energeticmaterials.org.cn