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         ResearchProgressinEnergyConversionComponentsforMEMSInitiatingExplosiveDevice

         ZHANG Bin,CHUEnyi,REIWei,WANG Kexuan,LIHui,YIN Ming
         (KeyLaboratoryofAppliedPhysicsChemistry,ShaanxiAppliedPhysicsChemistryResearchInstitute,Xi′an710061,China)

         Abstract:Theenergyconversioncomponentsasthecorepartsofinitiatingexplosivedeviceareanimportantfactorsaffectingthe
         safetyandreliabilityofmicroelectromechanicalsystems(MEMS)initiatingexplosivedevice,andtheeffectonthewholeweapon
         system alsocannotbeignored.Materialsresearchandstructuredesignoftheenergyconversioncomponentsareoneofresearch
         hotspotsinrecentyears.From theperspectiveofsubstratematerialandresistancematerialresearch,structuredesignandsooneof
         energyconversioncomponents,thelatestresearchdevelopmentofenergyconversioncomponentsofMEMSinitiatingexplosivede
         viceoverthepastfew yearswasreviewedinthispaper.TwokeytechnologiesforenergyconversioncomponentsofMEMSinitia
         tingexplosivedevice:design/preparationmethodoftheenergyconversioncomponentsofMEMSinitiatingexplosivedeviceand
         measurementandcharacterizationforperformanceparametersoftheenergyconversioncomponents,wereintroducedPointingout
         thattheenergyconversioncomponentofMEMSinitiatingexplosivedevicewithminiaturization,integration,multifunctionand
         highreliabilityisahotpointofresearchinthefuture.Toprovidetheoreticalsupportfordesignandresearchoftheenergyconver
         sioncomponentofofMEMSinitiatingexplosivedevice,thestudyonheatdissipationcharacteristicsandbridgeresistancecharac
         teristicsundermicroscaleshouldbestrengthened.Consideringthatthecompositeenergeticthinfilm bridgeenergyconversion
         componentisanimportantdevelopmentdirectionofenergyconversioncomponentofMEMSinitiatingexplosivedevice.
         Keywords:micro electromechanicalsystems(MEMS) initiatingexplosivedevice;energyconversion components;thin film
         bridge;bridgestructure
         CLCnumber:TJ55                  Documentcode:A                DOI:10.11943/j.issn.10069941.2017.05.013



         ChineseJournalofEnergeticMaterials,Vol.25,No.5,2017(428-436)  !"#$            www.energeticmaterials.org.cn
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