Metastable intermolecular composites （MICs） have the advantages of ultra-high reaction rate， high bulk energy density and micron critical reaction propagation size. They show broad application prospects in military fields such as micro energetic devices and rocket propellants. Nano Al/CuO energetic composite films are one of the research hotspots in the field of metastable intermolecular composites. They are prepared by vapor deposition， compatible with the micromachining process of energetic micro electro mechanical systems （MEMS）， and have great application prospects in integrated energetic devices. The preparation， thermal properties， combustion properties， reaction kinetics， the effect of transition layer on the properties of Nano Al/CuO energetic composite films， energetic devices （igniters） and their application technology are reviewed， and the development direction of Nano Al/CuO energetic composite films is prospected.