CHINESE JOURNAL OF ENERGETIC MATERIALS
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Research Progress of Direct Writing Technology for MEMS Energetic Devices
Author:
  • HOU Xin-rui 1,2,3

    HOU Xin-rui

    Nanjing University of Science and Technology,School of Chemical Engineering, Nanjing 210094, China;Nanjing University of Science and Technology,Institute of Space Propulsion, Nanjing 210094, China;Micro-Nano Energetic Devices Key Laboratory of the MIIT, Nanjing 210094, China
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  • CHEN Len-jian 1,2,3

    CHEN Len-jian

    Nanjing University of Science and Technology,School of Chemical Engineering, Nanjing 210094, China;Nanjing University of Science and Technology,Institute of Space Propulsion, Nanjing 210094, China;Micro-Nano Energetic Devices Key Laboratory of the MIIT, Nanjing 210094, China
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  • WU Li-zhi 1,2,3

    WU Li-zhi

    Nanjing University of Science and Technology,School of Chemical Engineering, Nanjing 210094, China;Nanjing University of Science and Technology,Institute of Space Propulsion, Nanjing 210094, China;Micro-Nano Energetic Devices Key Laboratory of the MIIT, Nanjing 210094, China
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  • SHEN Rui-qi 1,2,3

    SHEN Rui-qi

    Nanjing University of Science and Technology,School of Chemical Engineering, Nanjing 210094, China;Nanjing University of Science and Technology,Institute of Space Propulsion, Nanjing 210094, China;Micro-Nano Energetic Devices Key Laboratory of the MIIT, Nanjing 210094, China
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  • YE Ying-hua 1,2,3

    YE Ying-hua

    Nanjing University of Science and Technology,School of Chemical Engineering, Nanjing 210094, China;Nanjing University of Science and Technology,Institute of Space Propulsion, Nanjing 210094, China;Micro-Nano Energetic Devices Key Laboratory of the MIIT, Nanjing 210094, China
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Affiliation:

1.Nanjing University of Science and Technology,School of Chemical Engineering, Nanjing 210094, China;2.Nanjing University of Science and Technology,Institute of Space Propulsion, Nanjing 210094, China;3.Micro-Nano Energetic Devices Key Laboratory of the MIIT, Nanjing 210094, China

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    Abstract:

    As a new generation of rapid prototyping technology, direct writing technology has the advantages of fast molding speed, good molding consistency, and high preparation accuracy. It has certain advantages in the preparation of MEMS energetic devices. In this paper, the common direct writing technologies of MEMS energetic devices were described. On this basis, according to the research status of direct writing technology in micro-nano energetic devices, the direct writing technologies used in micro-scale charges of MEMS energetic devices, ignition circuit and transducer element, and packaging materials were summarized. The future research directions were proposed: preparing energetic ink with high solid content and stable performance, increasing the charge density of energetic ink, preparing silver ink circuit with low sintering temperature, and at the same time developing direct writing technology for MEMS energetic device transducers and packaging materials, exploring the influencing factors and laws of direct writing accuracy, breaking through the application bottleneck of direct writing technology, and promoting the progress of engineering application of this technology.

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Get Citation

侯鑫瑞,陈乐健,吴立志,等.微机电含能器件直写技术研究进展[J].含能材料,2021,29(9):871-882.
HOU Xin-rui, CHEN Len-jian, WU Li-zhi, et al. Research Progress of Direct Writing Technology for MEMS Energetic Devices[J]. Chinese Journal of Energetic Materials,2021,29(9):871-882.

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History
  • Received:November 27,2020
  • Revised:July 05,2021
  • Adopted:May 27,2021
  • Online: June 09,2021
  • Published: September 25,2021