Considering the problem that copper azide (Cu(N₃)₂) has high electrostatic sensitivity and it is difficult to be practically applied, the silicon-based Cu(N₃)₂@carbon nanotubes (CNTs) composite energetic film which can be compatible with Microelectro Mechanical Systems (MEMs) was designed. First, the silicon-based porous alumina film with CNTs grown inside the pores was prepared by a modified two-step anodic oxidation method. Then copper nanoparticles were deposited in the CNTs by electrochemical deposition. The hydrogen azide gas was prepared by reaction between the nitric acid and sodium azide, which reacted with the copper nanoparticles to synthesize Cu(N₃)₂. The morphology, structure and composition of the prepared silicon-based Cu(N₃)₂@CNTs composite energetic films were characterized by field emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM) and X-ray diffraction (XRD). Thermal decomposition kinetics of the composite energetic film was studied by differential scanning calorimetry (DSC). Electrostatic sensitivity of the composite energetic film was tested by lifting method. Results show that activation energy of the silicon-based Cu(N₃)₂@CNTs composite film is about 230.00 kJ·mol^-1, while the critical temperature of thermal explosion is about 193.18 ℃ and the 50% ignition energy is about 4.0 mJ. The electrostatic sensitivity of silicon-based Cu(N₃)₂@CNTs composite energetic film is significantly reduced.