The integrated fabrication of exploding foil initiator was realized by micro-electromechanical system manufacturing technology. Bridge foil of Cu with 0.4 mm×0.4 mm×4.6 μm(L×W×H) and poly(monochloro-p-xylylene)(Parylene C) a thickness of 25 μm/Cu with a thickness of 2 μm multilayer flyer were prepared by magnetron sputtering process and chemical vapor deposition technology. The preparation of SUEX dry film barrel was realized by ultraviolet lithography technology. Three kinds of barrels with a thickness of 0.395 mm and diameters of 0.40 mm, 0.56 mm and 1.00 mm were obtained and their wall verticalities were good. The influence of firing voltage and barrel size on the velocity of multilayer flyer were studied by photonic doppler velometer(PDV) measurement system. The detonation tests of HNS explosives were carried out. Results show that the velocity of the multilayer flyer gradually increases with increasing the firing voltage. Under the same firing condition, on the contrary, the velocity of the multi-layer flyer gradually increases with decreasing the diameter of the barrel, i.e. under the same firing condition, the velocity of the multilayer flyer for the barrel with a diameter of 0.40 mm is the maximum. Results of initiating HNS explosives reveal that the firing voltage gradually decreases with decreasing the diameter of the barrel. Compared with the barrel with a diameter of 1.00 mm, the firing voltage of barrel with a diameter of 0.40 mm reduces by about 200 V under the capacitor discharge condition of 0.22 μF.