An integrated exploding foil initiator(EFI) based on a parylene-C flyer and Su8 photo-resist barrel was fabricated using magnetron sputtering, photolithography, and chemical vapor deposition(CVD). The effect of structure parameters of exploding foil, flyer and barrel on the loading capability of flyer was investigated by photonic Doppler. Results show that under the conditions of initiation voltage 2.6 kV, capacitance 0.2 μF, and discharge duration 1.2 μs, through the test, finding that the change of part of materials for EFI caused by integrated fabricating dose not significantly influence the loading capability of flyer. The EFI′s driving process of parylene-C and polyimide flyer with identical dimension are similar to each other. The flyer driving capability of integrated EFI was consistent with that of classic EFI with same structure parameters. The HNS-Ⅳ can successfully be detonated by the integrated EFI.