To study the method for the fabrication of exploding foil initiator(EFI)) integrated assembly and its performance, the parylene C flyer sheets deposited on the exploding foil substrate were fabricated by the chemical vapor deposition(CVD) method and the Su8-2150 photoresist accelerating barrier was in-situ integrated by the photolithography.The Su8-2150 accelerating barrier with thickness of more than 300 μm and good surface vertical degree was obtained.The acceleration history of flyers of EFI driven with electrical explosion was obtained by the photonic doppler velocimetry(PDV) measurement technique.The acceleration history of flyers of EFI fabricated by the conventional method with polyimide flyer and integrated method with the same parameters were compared.Results show that the two groups of acceleration history are basically the same.Within the first 80ns, the polyimide flyer and PC flyer have completed 77% and 80% of maximum velocity, the velocities of the polyimide flyer and PC flyer at the exit of barrier are 3970 m·s^-1 and 3906 m·s^-1 respectively, two kinds of driving performances of EFI are close.The change of material of flyer and accelerating barrier does not affect observably on the flyer process driven by electrical exploding.