In order to reduce the ignition energy of exploding foil initiator(EFI), and optimize the performance and the parameter of high voltage pulse power source, and the effects of the high voltage pulse power source equivalent parameter on the exploding performance of the foil bridge were investigated with 0.5mm×0.5mm×5.0μm copper foil bridge. By calculating the performance parameter including the equivalent inductance, equivalent resistance, capacitance of pulsed power capacitor and load voltage according to the oscillation waveform parameters from the experimental, the energy efficiency was obtained, and the change rules were studied. Results show that when the capacitance is 0.2 μF, equivalent inductance is 57 nH, the equivalent resistance is 68 mΩ and the load voltage is 2.0 kV of high voltage pulse power source, the exploding performance of the foil bridge is the best, that energy efficiency is 54.8%, reaching the highest, and the time difference of the burst time and the peak time are the shortest.