PTFE/Al (polytetrafluoroethylene/aluminum) reactive multilayer films with different thickness and alternating deposition were prepared by a radio frequency magnetron sputtering method using Al as combustible and PTFE as oxidant. The influence rules of sputtering power on the film surface morphology was investigated by atomic force microscope (AFM) and X-ray diffraction (XRD).The appropriate preparation technology of the films was obtained. The mechanical property of PTFE/Al reactive multilayer films was measured by a nano-indentation apparatus. Results show that when the radio frequency sputtering power is 50 W and 150 W, the mean roughness and RMS roughness of PTFE film and Al film obtained are low. When the total thickness of PTFE/Al reactive multilayer films is about 300 nm, in comparison with pure PTFE film and Al film, PTFE/Al reactive multilayer films have higher hardness and elastic modulus: 5.8 GPa and 120.0 GPa, respectively.