Gas evolution of silicon cushion materials with different structure was investigated by using TG-IR, GC-MS and solid microextraction. The results showed that inorganic ingredients such as H₂O,CO₂ and partial organic ingredients were detected among the gas enrichment of all the samples. The gas enriching components at 100 ℃ had similar ingredients to that at 200 ℃,although organic ingredients in a few samples increased at 200 ℃.