1.杭州电子科技大学微电子研究院1;2.陕西应用物理化学研究所 应用物理化学国家级重点实验室, 陕西 西安 710061
1.Micro-Electronics Research Institute, Hangzhou Dianzi University,Hangzhou 310018, China;2.I National Key Laboratory of Applied Physics and Chemistry, Shaanxi Applied Physics and Chemistry Research Institute, Xi′an 710061 China
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LI Hui, LUO Jian-jun, REN Wei, et al. Thin Film Transducer Chip with an Integrated PN Junction Protective Structure[J]. Chinese Journal of Energetic Materials, 2023, 31(3):222-228. DOI:10.11943/CJEM2022278.