CHINESE JOURNAL OF ENERGETIC MATERIALS
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多晶硅与Al/CuO复合薄膜集成的含能点火器件的点火性能
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作者单位:

(南京理工大学化工学院, 江苏 南京 210094)

作者简介:

李勇(1986-),男,博士研究生,主要从事火工品点火性能相关研究。e-mail: liyongnust@126.com 通信联系人: 周彬(1971-),女,副研究员,主要从事半导体桥火工品研究。e-mail: zhoubin8266@sina.com.cn

通讯作者:

周彬(1971-),女,副研究员,主要从事半导体桥火工品研究。e-mail: zhoubin8266@sina.com.cn

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Ignition Performances of Energetic Igniters Integrated by Integrating Polysilicon with Al/CuO Multilayer Films
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(School of Chemical Engineering, Nanjing University of Science & Technology, Nanjing 210094, China)

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    摘要:

    为研究多晶硅桥型与尺寸对Al/CuO含能点火器件点火性能的影响规律, 用多晶硅和Al/CuO复合薄膜集成制备了6种不同形状和尺寸的含能点火器件, 采用尼亚D-最优感度试验法测试了四种尺寸、两种桥形共6种类型(S、M、Lr、Lv、Hr、Hv)点火器件的点火感度。探索了临界爆发电压, 得到了点火时间随激励电压的变化规律。采用感度实验和点火实验对比研究了多晶硅点火器件和含能点火器件的点火性能。结果表明, 含能点火器件的感度与点火时间随桥膜体积的增大而减小。V形桥膜有助于降低作用时间与作用所需能量。Lv型含能点火器件感度为8.19 V, 标准偏差0.14, 均低于Lv型多晶硅点火器件(8.70 V、0.53)。Lv型含能点火器件14 V时的点火时间(52.85 μs)比多晶硅点火器件点火时间(109.12 μs)短, 且该差值随激励能量升高而降低。

    Abstract:

    To study the effect rule of the type and size for polysilicon bridge on the ignition performance of Al/CuO energetic igniter, six kinds of energetic igniters with different shapes and sizes were prepared by integrating polysilicon with Al/CuO multilayer films and the firing sensitivities of four sizes and two bridges-a total of six kinds of igniters(S, M, Lr, Lv, Hr, Hv)were tested by employing the Neyer D-optimal sensitivity method. The critical electro-exploding voltages of the igniters were explored. The change rule in firing time with the excitation voltage was obtained. The ignition performances of polysilicon igniter and energetic igniter were comparatively studied by sensitivity test and ignition test. Results show that the sensitivity and firing time decrease with increasing the bridge film volume, and the V-type-angle bridge film helps to decrease the action time and energy needed for the action. The 50%-firing voltage of 8.70 V and standard deviation of 0.53 of the polysilicon igniters are higher than those of the energetic igniters (8.19 V, 0.14). Due to the energy release during chemical reaction of Al/CuO multilayer films, average firing time of 52.85 μs of the energetic igniters at 14 V is much lower than that of 109.12 μs of the polysilicon igniter at 14 V and this difference decreases with the increase of excitation energy.

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引用本文

李勇,王军,高泽志,等.多晶硅与Al/CuO复合薄膜集成的含能点火器件的点火性能[J].含能材料, 2016, 24(2):182-187. DOI:10.11943/j. issn.1006-9941.2016.02.013.
LI Yong, WANG Jun, GAO Ze-zhi, et al. Ignition Performances of Energetic Igniters Integrated by Integrating Polysilicon with Al/CuO Multilayer Films[J]. Chinese Journal of Energetic Materials, 2016, 24(2):182-187. DOI:10.11943/j. issn.1006-9941.2016.02.013.

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历史
  • 收稿日期: 2015-02-12
  • 最后修改日期: 2015-05-23
  • 录用日期: 2015-06-03
  • 在线发布日期: 2016-01-19
  • 出版日期: 2016-01-25